Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity.
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| Title: | Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity. |
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| Authors: | Engst, C. R.1, Rommel, M.2, Bscheid, C.1, Eisele, I.1,3, Kutter, C.1,3 |
| Source: | Journal of Applied Physics; 12/7/2017, Vol. 122 Issue 21, p1-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.4993127 |
