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Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.

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Bibliographic Details
Title: Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.
Authors: Yang, C. R.1, Yeh, C. H.1, Hu, L. C.1, Wei, T. C.2, Lee, C. C.3, Chang, J. Y.3, Li, T. T.1, tomili@cc.ncu.edu.tw
Source: Plasma Chemistry & Plasma Processing; Jan2018, Vol. 38 Issue 1, p247-259, 13p
Database: Applied Science & Technology Source
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Description
ISSN:02724324
DOI:10.1007/s11090-017-9853-3