View in EDS HTML Full Text PDF Full Text

Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.

Saved in:
Bibliographic Details
Title: Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.
Authors: Yang, C. R.1, Yeh, C. H.1, Hu, L. C.1, Wei, T. C.2, Lee, C. C.3, Chang, J. Y.3, Li, T. T.1, tomili@cc.ncu.edu.tw
Source: Plasma Chemistry & Plasma Processing; Jan2018, Vol. 38 Issue 1, p247-259, 13p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 127145143
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Yang%2C+C%2E+R%2E%22">Yang, C. R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yeh%2C+C%2E+H%2E%22">Yeh, C. H.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Hu%2C+L%2E+C%2E%22">Hu, L. C.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wei%2C+T%2E+C%2E%22">Wei, T. C.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lee%2C+C%2E+C%2E%22">Lee, C. C.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Chang%2C+J%2E+Y%2E%22">Chang, J. Y.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+T%2E+T%2E%22">Li, T. T.</searchLink><relatesTo>1</relatesTo>, <i>tomili@cc.ncu.edu.tw</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Plasma+Chemistry+%26+Plasma+Processing%22">Plasma Chemistry & Plasma Processing</searchLink>; Jan2018, Vol. 38 Issue 1, p247-259, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=127145143
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s11090-017-9853-3
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 13
        StartPage: 247
    Titles:
      – TitleFull: Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Yang, C. R.
      – PersonEntity:
          Name:
            NameFull: Yeh, C. H.
      – PersonEntity:
          Name:
            NameFull: Hu, L. C.
      – PersonEntity:
          Name:
            NameFull: Wei, T. C.
      – PersonEntity:
          Name:
            NameFull: Lee, C. C.
      – PersonEntity:
          Name:
            NameFull: Chang, J. Y.
      – PersonEntity:
          Name:
            NameFull: Li, T. T.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan2018
              Type: published
              Y: 2018
          Identifiers:
            – Type: issn-print
              Value: 02724324
          Numbering:
            – Type: volume
              Value: 38
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Plasma Chemistry & Plasma Processing
              Type: main
ResultId 1