Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering.
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| Title: | Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering. |
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| Authors: | Turkoglu, F.1, Koseoglu, H.1, Zeybek, S.2, Ozdemir, M.2, Aygun, G.1, Ozyuzer, L.1,2 |
| Source: | Journal of Applied Physics; 2018, Vol. 123 Issue 16, pN.PAG-N.PAG, 8p, 1 Diagram, 1 Chart, 6 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.5012883 |
