Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering.
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| Title: | Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering. |
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| Authors: | Turkoglu, F.1, Koseoglu, H.1, Zeybek, S.2, Ozdemir, M.2, Aygun, G.1, Ozyuzer, L.1,2 |
| Source: | Journal of Applied Physics; 2018, Vol. 123 Issue 16, pN.PAG-N.PAG, 8p, 1 Diagram, 1 Chart, 6 Graphs |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 129382450 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=129382450 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.5012883 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: N.PAG Titles: – TitleFull: Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Turkoglu, F. – PersonEntity: Name: NameFull: Koseoglu, H. – PersonEntity: Name: NameFull: Zeybek, S. – PersonEntity: Name: NameFull: Ozdemir, M. – PersonEntity: Name: NameFull: Aygun, G. – PersonEntity: Name: NameFull: Ozyuzer, L. IsPartOfRelationships: – BibEntity: Dates: – D: 28 M: 04 Text: 2018 Type: published Y: 2018 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 123 – Type: issue Value: 16 Titles: – TitleFull: Journal of Applied Physics Type: main |
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