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Annealing and biasing effects on the structural and optical properties of PECVD-grown TiO2 films from TTIP/O2 plasma.

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Bibliographic Details
Title: Annealing and biasing effects on the structural and optical properties of PECVD-grown TiO2 films from TTIP/O2 plasma.
Authors: Li, D.1, dyli@yzu.edu.cn, Dai, S.1, Goullet, A.2, Carette, M.3, Granier, A.2, Landesman, J. P.4
Source: Journal of Materials Science: Materials in Electronics; Aug2018, Vol. 29 Issue 15, p13254-13264, 11p
Database: Applied Science & Technology Source
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ISSN:09574522
DOI:10.1007/s10854-018-9449-6