Effect of O2 flow rate on the characteristics of ZnO thin films deposited by RF reactive magnetron sputtering.
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| Title: | Effect of O2 flow rate on the characteristics of ZnO thin films deposited by RF reactive magnetron sputtering. |
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| Authors: | Kamble, Sudhir S.1, sudhirsk@debel.drdo.in, Radhakrishnan, J. K.1, Krishnamoorthy, Rajavel2 |
| Source: | Materials Technology; Sep2018, Vol. 33 Issue 11, p709-715, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10667857 |
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| DOI: | 10.1080/10667857.2018.1497834 |
