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Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources.

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Title: Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources.
Authors: Xu, Tiantong1, Tao, Zhi1, Lozano, Paulo C.2, plozano@mit.edu
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Sep2018, Vol. 36 Issue 5, pN.PAG-N.PAG, 13p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 132012708
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources.
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  Data: <searchLink fieldCode="AU" term="%22Xu%2C+Tiantong%22">Xu, Tiantong</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tao%2C+Zhi%22">Tao, Zhi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Lozano%2C+Paulo+C%2E%22">Lozano, Paulo C.</searchLink><relatesTo>2</relatesTo>, <i>plozano@mit.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; Sep2018, Vol. 36 Issue 5, pN.PAG-N.PAG, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=132012708
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1116/1.5034131
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 13
        StartPage: N.PAG
    Titles:
      – TitleFull: Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources.
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          Name:
            NameFull: Xu, Tiantong
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            NameFull: Tao, Zhi
      – PersonEntity:
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            NameFull: Lozano, Paulo C.
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          Dates:
            – D: 01
              M: 09
              Text: Sep2018
              Type: published
              Y: 2018
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              Value: 36
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              Value: 5
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
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