Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics.
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| Title: | Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics. |
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| Authors: | Serra, Enrico, Morana, Bruno, Borrielli, Antonio, Marin, Francesco, Pandraud, Gregory, Pontin, Antonio, Prodi, Giovanni Andrea, Sarro, Pasqualina M., Bonaldi, Michele |
| Source: | Journal of Microelectromechanical Systems; Dec2018, Vol. 26 Issue 12, p1193-1203, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2018.2876593 |
