In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems.
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| Title: | In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems. |
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| Authors: | Randolph, Steven Jeffrey1, steven.randolph@thermofisher.com, Filevich, Jorge1, Botman, Aurelien1, Gannon, Renae1, Rue, Chad1, Straw, Marcus1 |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2018, Vol. 36 Issue 6, pN.PAG-N.PAG, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/1.5047806 |
