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In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems.

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Title: In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems.
Authors: Randolph, Steven Jeffrey1, steven.randolph@thermofisher.com, Filevich, Jorge1, Botman, Aurelien1, Gannon, Renae1, Rue, Chad1, Straw, Marcus1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2018, Vol. 36 Issue 6, pN.PAG-N.PAG, 7p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 133444263
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems.
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  Data: <searchLink fieldCode="AU" term="%22Randolph%2C+Steven+Jeffrey%22">Randolph, Steven Jeffrey</searchLink><relatesTo>1</relatesTo>, <i>steven.randolph@thermofisher.com</i><br /><searchLink fieldCode="AU" term="%22Filevich%2C+Jorge%22">Filevich, Jorge</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Botman%2C+Aurelien%22">Botman, Aurelien</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Gannon%2C+Renae%22">Gannon, Renae</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Rue%2C+Chad%22">Rue, Chad</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Straw%2C+Marcus%22">Straw, Marcus</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; Nov2018, Vol. 36 Issue 6, pN.PAG-N.PAG, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=133444263
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1116/1.5047806
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 7
        StartPage: N.PAG
    Titles:
      – TitleFull: In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems.
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            NameFull: Randolph, Steven Jeffrey
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            NameFull: Filevich, Jorge
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            NameFull: Botman, Aurelien
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            NameFull: Gannon, Renae
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            NameFull: Rue, Chad
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            NameFull: Straw, Marcus
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          Dates:
            – D: 01
              M: 11
              Text: Nov2018
              Type: published
              Y: 2018
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              Value: 21662746
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              Value: 36
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              Value: 6
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
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