High performance and low-cost graphene vacuum pressure sensor based on one-step laser scribing.
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| Title: | High performance and low-cost graphene vacuum pressure sensor based on one-step laser scribing. |
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| Authors: | Jin, Fu-Hua1,2,3,4, Pang, Yu1,2, Cai, Wen-Long5, Jian, Jin-Ming1,2, Ren, Lin-Lin1,2, Fan, Yan-Yan1,6, Li, Ming-Rui1,2, Zhao, Wei-Sheng5, Yang, Yi1,2, Yang, Si-Fan1,2,3, Ren, Tian-Ling1,2, RenTL@tsinghua.edu.cn |
| Source: | Applied Physics Letters; 2/25/2019, Vol. 114 Issue 8, pN.PAG-N.PAG, 5p, 1 Diagram, 1 Chart, 3 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.5049838 |