Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip.
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| Title: | Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip. |
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| Authors: | Chang, Joe-Ming1, Wu, Wei-Jung2, Chang, Wei-Yu2, Chen, Fu-Rong2, Tseng, Fan-Gang2 |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2019, Vol. 37 Issue 3, pN.PAG-N.PAG, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/1.5088866 |
