Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition.
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| Title: | Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition. |
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| Authors: | Xu, Yu1, Zhang, Yu2, Li, Linjun2, Ding, Ke1,2, Guo, Ying2, Shi, Jianjun1,2, Huang, Xiaojiang2, Zhang, Jing1, jingzh@dhu.edu.cn |
| Source: | Plasma Chemistry & Plasma Processing; Jul2019, Vol. 39 Issue 4, p937-947, 11p |
| Database: | Applied Science & Technology Source |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 136800449 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Xu%2C+Yu%22">Xu, Yu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Yu%22">Zhang, Yu</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Linjun%22">Li, Linjun</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Ding%2C+Ke%22">Ding, Ke</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Guo%2C+Ying%22">Guo, Ying</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Shi%2C+Jianjun%22">Shi, Jianjun</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Huang%2C+Xiaojiang%22">Huang, Xiaojiang</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Jing%22">Zhang, Jing</searchLink><relatesTo>1</relatesTo>, <i>jingzh@dhu.edu.cn</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Plasma+Chemistry+%26+Plasma+Processing%22">Plasma Chemistry & Plasma Processing</searchLink>; Jul2019, Vol. 39 Issue 4, p937-947, 11p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=136800449 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s11090-019-09961-0 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 11 StartPage: 937 Titles: – TitleFull: Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Xu, Yu – PersonEntity: Name: NameFull: Zhang, Yu – PersonEntity: Name: NameFull: Li, Linjun – PersonEntity: Name: NameFull: Ding, Ke – PersonEntity: Name: NameFull: Guo, Ying – PersonEntity: Name: NameFull: Shi, Jianjun – PersonEntity: Name: NameFull: Huang, Xiaojiang – PersonEntity: Name: NameFull: Zhang, Jing IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 07 Text: Jul2019 Type: published Y: 2019 Identifiers: – Type: issn-print Value: 02724324 Numbering: – Type: volume Value: 39 – Type: issue Value: 4 Titles: – TitleFull: Plasma Chemistry & Plasma Processing Type: main |
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