Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition.

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Title: Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition.
Authors: Xu, Yu1, Zhang, Yu2, Li, Linjun2, Ding, Ke1,2, Guo, Ying2, Shi, Jianjun1,2, Huang, Xiaojiang2, Zhang, Jing1, jingzh@dhu.edu.cn
Source: Plasma Chemistry & Plasma Processing; Jul2019, Vol. 39 Issue 4, p937-947, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 136800449
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  Data: Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition.
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        Value: 10.1007/s11090-019-09961-0
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      – Code: eng
        Text: English
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        PageCount: 11
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      – TitleFull: Synergistic Effect of Plasma Discharge and Substrate Temperature in Improving the Crystallization of TiO2 Film by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition.
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              Text: Jul2019
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              Y: 2019
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