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Neural network-based model of photoresist reflow.

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Bibliographic Details
Title: Neural network-based model of photoresist reflow.
Authors: Chia, Charmaine1, cchia@stanford.edu, Martis, Joel1, Jeffrey, Stefanie S.2, Howe, Roger T.1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2019, Vol. 37 Issue 6, p1-8, 8p
Database: Applied Science & Technology Source
Description
ISSN:21662746
DOI:10.1116/1.5116857