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Neural network-based model of photoresist reflow.

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Bibliographic Details
Title: Neural network-based model of photoresist reflow.
Authors: Chia, Charmaine1, cchia@stanford.edu, Martis, Joel1, Jeffrey, Stefanie S.2, Howe, Roger T.1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2019, Vol. 37 Issue 6, p1-8, 8p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 140275602
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Neural network-based model of photoresist reflow.
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  Data: <searchLink fieldCode="AU" term="%22Chia%2C+Charmaine%22">Chia, Charmaine</searchLink><relatesTo>1</relatesTo>, <i>cchia@stanford.edu</i><br /><searchLink fieldCode="AU" term="%22Martis%2C+Joel%22">Martis, Joel</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Jeffrey%2C+Stefanie+S%2E%22">Jeffrey, Stefanie S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Howe%2C+Roger+T%2E%22">Howe, Roger T.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; Nov2019, Vol. 37 Issue 6, p1-8, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=140275602
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.5116857
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1
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      – TitleFull: Neural network-based model of photoresist reflow.
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            NameFull: Chia, Charmaine
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            NameFull: Martis, Joel
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            NameFull: Jeffrey, Stefanie S.
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            NameFull: Howe, Roger T.
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            – D: 01
              M: 11
              Text: Nov2019
              Type: published
              Y: 2019
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              Value: 21662746
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              Value: 37
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              Value: 6
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
              Type: main
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