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Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.

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Bibliographic Details
Title: Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.
Authors: Gosar, Žiga1,2, Kovač, Janez3, Mozetič, Miran3,4, Primc, Gregor3,4, Vesel, Alenka3,4, Zaplotnik, Rok3,4, rok.zaplotnik@ijs.si
Source: Plasma Chemistry & Plasma Processing; Jan2020, Vol. 40 Issue 1, p25-42, 18p
Database: Applied Science & Technology Source
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ISSN:02724324
DOI:10.1007/s11090-019-10026-5