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Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.

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Title: Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.
Authors: Gosar, Žiga1,2, Kovač, Janez3, Mozetič, Miran3,4, Primc, Gregor3,4, Vesel, Alenka3,4, Zaplotnik, Rok3,4, rok.zaplotnik@ijs.si
Source: Plasma Chemistry & Plasma Processing; Jan2020, Vol. 40 Issue 1, p25-42, 18p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 141098926
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=141098926
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        Value: 10.1007/s11090-019-10026-5
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      – Code: eng
        Text: English
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        PageCount: 18
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      – TitleFull: Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor.
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            NameFull: Kovač, Janez
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            NameFull: Mozetič, Miran
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            NameFull: Primc, Gregor
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            – D: 01
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              Text: Jan2020
              Type: published
              Y: 2020
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