Electrical and optical properties of titanium oxynitride thin films.
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| Title: | Electrical and optical properties of titanium oxynitride thin films. |
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| Authors: | Mucha, Nikhil R.1, Som, Jacob1, Shaji, Surabhi1, Fialkova, Svitlana1, Apte, Prakash R.2, Balasubramanian, Balamurugan3, Shield, Jeffrey E.4, Anderson, Mark4, Kumar, Dhananjay1, dkumar@ncat.edu |
| Source: | Journal of Materials Science; Apr2020, Vol. 55 Issue 12, p5123-5134, 12p, 4 Diagrams, 6 Graphs |
| Database: | Applied Science & Technology Source |
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| ISSN: | 00222461 |
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| DOI: | 10.1007/s10853-019-04278-x |
