Electrical and optical properties of titanium oxynitride thin films.

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Title: Electrical and optical properties of titanium oxynitride thin films.
Authors: Mucha, Nikhil R.1, Som, Jacob1, Shaji, Surabhi1, Fialkova, Svitlana1, Apte, Prakash R.2, Balasubramanian, Balamurugan3, Shield, Jeffrey E.4, Anderson, Mark4, Kumar, Dhananjay1, dkumar@ncat.edu
Source: Journal of Materials Science; Apr2020, Vol. 55 Issue 12, p5123-5134, 12p, 4 Diagrams, 6 Graphs
Database: Applied Science & Technology Source
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An: 141513841
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  Data: Electrical and optical properties of titanium oxynitride thin films.
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  Data: <searchLink fieldCode="AU" term="%22Mucha%2C+Nikhil+R%2E%22">Mucha, Nikhil R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Som%2C+Jacob%22">Som, Jacob</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Shaji%2C+Surabhi%22">Shaji, Surabhi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Fialkova%2C+Svitlana%22">Fialkova, Svitlana</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Apte%2C+Prakash+R%2E%22">Apte, Prakash R.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Balasubramanian%2C+Balamurugan%22">Balasubramanian, Balamurugan</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Shield%2C+Jeffrey+E%2E%22">Shield, Jeffrey E.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Anderson%2C+Mark%22">Anderson, Mark</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Kumar%2C+Dhananjay%22">Kumar, Dhananjay</searchLink><relatesTo>1</relatesTo>, <i>dkumar@ncat.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%22">Journal of Materials Science</searchLink>; Apr2020, Vol. 55 Issue 12, p5123-5134, 12p, 4 Diagrams, 6 Graphs
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=141513841
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      – Type: doi
        Value: 10.1007/s10853-019-04278-x
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        Text: English
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      – TitleFull: Electrical and optical properties of titanium oxynitride thin films.
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              Text: Apr2020
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