Electrical and optical properties of titanium oxynitride thin films.
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| Title: | Electrical and optical properties of titanium oxynitride thin films. |
|---|---|
| Authors: | Mucha, Nikhil R.1, Som, Jacob1, Shaji, Surabhi1, Fialkova, Svitlana1, Apte, Prakash R.2, Balasubramanian, Balamurugan3, Shield, Jeffrey E.4, Anderson, Mark4, Kumar, Dhananjay1, dkumar@ncat.edu |
| Source: | Journal of Materials Science; Apr2020, Vol. 55 Issue 12, p5123-5134, 12p, 4 Diagrams, 6 Graphs |
| Database: | Applied Science & Technology Source |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 141513841 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=141513841 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s10853-019-04278-x Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 12 StartPage: 5123 Titles: – TitleFull: Electrical and optical properties of titanium oxynitride thin films. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Mucha, Nikhil R. – PersonEntity: Name: NameFull: Som, Jacob – PersonEntity: Name: NameFull: Shaji, Surabhi – PersonEntity: Name: NameFull: Fialkova, Svitlana – PersonEntity: Name: NameFull: Apte, Prakash R. – PersonEntity: Name: NameFull: Balasubramanian, Balamurugan – PersonEntity: Name: NameFull: Shield, Jeffrey E. – PersonEntity: Name: NameFull: Anderson, Mark – PersonEntity: Name: NameFull: Kumar, Dhananjay IsPartOfRelationships: – BibEntity: Dates: – D: 22 M: 04 Text: Apr2020 Type: published Y: 2020 Identifiers: – Type: issn-print Value: 00222461 Numbering: – Type: volume Value: 55 – Type: issue Value: 12 Titles: – TitleFull: Journal of Materials Science Type: main |
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