Prediction of dislocation density in AlN or GaN films deposited on (0001) sapphire.
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| Title: | Prediction of dislocation density in AlN or GaN films deposited on (0001) sapphire. |
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| Authors: | Lay, S.1, sabine.lay@simap.grenoble-inp.fr, Mercier, F.1, Boichot, R.1, Giusti, G.2, Pons, M.1, Blanquet, E.1 |
| Source: | Journal of Materials Science; Aug2020, Vol. 55 Issue 22, p9152-9162, 11p, 6 Diagrams, 4 Graphs |
| Database: | Applied Science & Technology Source |
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| ISSN: | 00222461 |
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| DOI: | 10.1007/s10853-019-04240-x |