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Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration.

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Bibliographic Details
Title: Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration.
Authors: Challali, Fatiha1, fatiha.challali@univ-paris13.fr, Mendil, Djelloul2,3, Touam, Tahar2,3, Chauveau, Thierry1, Bockelée, Valérie1, Sanchez, Alexis Garcia1, Chelouche, Azeddine4, Besland, Marie-Paule5
Source: Materials Science in Semiconductor Processing; Nov2020, Vol. 118, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
Description
ISSN:13698001
DOI:10.1016/j.mssp.2020.105217