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Influence of Al pre-deposition time on AlGaN/GaN heterostructures grown on sapphire substrate by metal organic chemical vapor deposition.

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Bibliographic Details
Title: Influence of Al pre-deposition time on AlGaN/GaN heterostructures grown on sapphire substrate by metal organic chemical vapor deposition.
Authors: Liu, Chuanyang1,2, Wang, Jia3, Shen, Yiming3, Du, Lin3, Zhang, Yachao1, ychzhang@xidian.edu.cn, Xu, Shengrui1, Jiang, Li2, Zhang, Jincheng1, Hao, Yue1
Source: Journal of Materials Science: Materials in Electronics; Sep2020, Vol. 31 Issue 17, p14737-14745, 9p
Database: Applied Science & Technology Source
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ISSN:09574522
DOI:10.1007/s10854-020-04037-8