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Structural and physical characteristics of sputter deposited zirconium nitride thin films by sputtering at various time in Ar-N2 atmosphere.

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Bibliographic Details
Title: Structural and physical characteristics of sputter deposited zirconium nitride thin films by sputtering at various time in Ar-N2 atmosphere.
Authors: Gharib, Mahshad1, mahshadgharib@gmail.com, Eshraghi, Mohamad Javad2, Bordbari, Mahdi2
Source: Journal of Materials Science: Materials in Electronics; Dec2020, Vol. 31 Issue 23, p21515-21527, 13p
Database: Applied Science & Technology Source
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Description
ISSN:09574522
DOI:10.1007/s10854-020-04664-1