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The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.

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Bibliographic Details
Title: The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.
Authors: Wang, Zhijun1, wangzhijun@cdu.edu.cn, Yang, Chi1, yangchi0002@163.com, He, Pingni2, Zhu, Jie1, Zhang, Qian1, Zhao, Peng1, Mao, Xinchun1,3, mxch@caep.cn, Gou, Fujun1,2, gfujun@scu.edu.cn, Zhang, Kun1,2, kzhang@scu.edu.cn
Source: Thin Solid Films; Jan2021, Vol. 717, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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