Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-k NbLaO gate dielectric.
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| Title: | Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-k NbLaO gate dielectric. |
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| Authors: | Li, Hong-cheng1, Liu, Yu-rong1, phlyr@scut.edu.cn, Geng, Kui-wei1, Wu, Wei-jing2, Yao, Ruo-he1, Lai, Pui-to3, phlyr@scut.edu.cn |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2021, Vol. 39 Issue 1, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/6.0000522 |
