Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications.
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| Title: | Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications. |
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| Authors: | Chen, Guanyu1, Cheung, Eric Jun Hao1, Cao, Yu1, Pan, Jisheng2, Danner, Aaron J.1, adanner@nus.edu.sg |
| Source: | Nanoscale Research Letters; 2/10/2021, Vol. 16 Issue 1, p1-9, 9p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 19317573 |
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| DOI: | 10.1186/s11671-021-03494-2 |
