Electrical properties and deep trap spectra in Ga2O3 films grown by halide vapor phase epitaxy on p-type diamond substrates.

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Bibliographic Details
Title: Electrical properties and deep trap spectra in Ga2O3 films grown by halide vapor phase epitaxy on p-type diamond substrates.
Authors: Polyakov, Alexander Y.1, Nikolaev, Vladimir I.2,3, Tarelkin, Sergey A.1,4,5, Pechnikov, Alexei I.2,3, Stepanov, Sergey I.2,3, Nikolaev, Andrey E.3, Shchemerov, Ivan V.1, Yakimov, Eugene B.1,6, Luparev, Nikolay V.4,5, Kuznetsov, Mikhail S.4, Vasilev, Anton A.1, Kochkova, Anastasiya I.1, Voronova, Marina I.1, Scheglov, Mikhail P.3, Kim, Jihyun7, Pearton, Stephen J.8, spear@mse.ufl.edu
Source: Journal of Applied Physics; 5/14/2021, Vol. 129 Issue 18, p1-10, 10p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/5.0044531