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FIB micro-milled sapphire for GaN maskless epitaxial lateral overgrowth: a systematic study on patterning geometry.

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Bibliographic Details
Title: FIB micro-milled sapphire for GaN maskless epitaxial lateral overgrowth: a systematic study on patterning geometry.
Authors: Jelmakas, E.1, Kadys, A.1, Dmukauskas, M.1, Grinys, T.1, Tomašiūnas, R.1, rolandas.tomasiunas@ff.vu.lt, Dobrovolskas, D.1, Gervinskas, G.2, Juodkazis, S.2, Talaikis, M.3,4, Niaura, G.3,4
Source: Journal of Materials Science: Materials in Electronics; Jun2021, Vol. 32 Issue 11, p14532-14541, 10p
Database: Applied Science & Technology Source
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ISSN:09574522
DOI:10.1007/s10854-021-06010-5