FIB micro-milled sapphire for GaN maskless epitaxial lateral overgrowth: a systematic study on patterning geometry.
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| Title: | FIB micro-milled sapphire for GaN maskless epitaxial lateral overgrowth: a systematic study on patterning geometry. |
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| Authors: | Jelmakas, E.1, Kadys, A.1, Dmukauskas, M.1, Grinys, T.1, Tomašiūnas, R.1, rolandas.tomasiunas@ff.vu.lt, Dobrovolskas, D.1, Gervinskas, G.2, Juodkazis, S.2, Talaikis, M.3,4, Niaura, G.3,4 |
| Source: | Journal of Materials Science: Materials in Electronics; Jun2021, Vol. 32 Issue 11, p14532-14541, 10p |
| Database: | Applied Science & Technology Source |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 150989528 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=150989528 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s10854-021-06010-5 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 10 StartPage: 14532 Titles: – TitleFull: FIB micro-milled sapphire for GaN maskless epitaxial lateral overgrowth: a systematic study on patterning geometry. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Jelmakas, E. – PersonEntity: Name: NameFull: Kadys, A. – PersonEntity: Name: NameFull: Dmukauskas, M. – PersonEntity: Name: NameFull: Grinys, T. – PersonEntity: Name: NameFull: Tomašiūnas, R. – PersonEntity: Name: NameFull: Dobrovolskas, D. – PersonEntity: Name: NameFull: Gervinskas, G. – PersonEntity: Name: NameFull: Juodkazis, S. – PersonEntity: Name: NameFull: Talaikis, M. – PersonEntity: Name: NameFull: Niaura, G. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 06 Text: Jun2021 Type: published Y: 2021 Identifiers: – Type: issn-print Value: 09574522 Numbering: – Type: volume Value: 32 – Type: issue Value: 11 Titles: – TitleFull: Journal of Materials Science: Materials in Electronics Type: main |
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