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Silicon-nitride nanosensors toward room temperature quantum optomechanics.

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Bibliographic Details
Title: Silicon-nitride nanosensors toward room temperature quantum optomechanics.
Authors: Serra, Enrico1,2,3, E.Serra@tudelft.nl, Borrielli, Antonio1,2, Marin, Francesco4,5,6,7, Marino, Francesco6,7, Malossi, Nicola8,9, Morana, Bruno3, Piergentili, Paolo8,9, Prodi, Giovanni Andrea10, Sarro, Pasqualina Maria3, Vezio, Paolo6,7, Vitali, David8,9, Bonaldi, Michele1,2
Source: Journal of Applied Physics; 8/14/2021, Vol. 130 Issue 6, p1-17, 17p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/5.0055954