Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
Saved in:
| Title: | Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. |
|---|---|
| Authors: | Gosar, Žiga1,2, ziga.gosar@elvez.si, Đonlagić, Denis3, denis.donlagic@um.si, Pevec, Simon3, simon.pevec@um.si, Gergič, Bojan3, bojan.gergic@um.si, Mozetič, Miran4,5, miran.mozetic@ijs.si, Primc, Gregor4,5, gregor.primc@ijs.si, Vesel, Alenka4,5, alenka.vesel@guest.arnes.sirok.zaplotnik@ijs.si, Zaplotnik, Rok4,5 |
| Source: | Coatings (2079-6412); Oct2021, Vol. 11 Issue 10, p1218-1218, 1p |
| Database: | Applied Science & Technology Source |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 20796412 |
|---|---|
| DOI: | 10.3390/coatings11101218 |
