Gosar, Ž., Đonlagić, D., Pevec, S., Gergič, B., Mozetič, M., Primc, G., . . . Zaplotnik, R. (2021). Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. Coatings (2079-6412), 11(10), 1218. https://doi.org/10.3390/coatings11101218
Chicago Style (17th ed.) CitationGosar, Žiga, Denis Đonlagić, Simon Pevec, Bojan Gergič, Miran Mozetič, Gregor Primc, Alenka Vesel, and Rok Zaplotnik. "Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor." Coatings (2079-6412) 11, no. 10 (2021): 1218. https://doi.org/10.3390/coatings11101218.
MLA (9th ed.) CitationGosar, Žiga, et al. "Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor." Coatings (2079-6412), vol. 11, no. 10, 2021, p. 1218, https://doi.org/10.3390/coatings11101218.