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Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.

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Title: Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
Authors: Gosar, Žiga1,2, ziga.gosar@elvez.si, Đonlagić, Denis3, denis.donlagic@um.si, Pevec, Simon3, simon.pevec@um.si, Gergič, Bojan3, bojan.gergic@um.si, Mozetič, Miran4,5, miran.mozetic@ijs.si, Primc, Gregor4,5, gregor.primc@ijs.si, Vesel, Alenka4,5, alenka.vesel@guest.arnes.sirok.zaplotnik@ijs.si, Zaplotnik, Rok4,5
Source: Coatings (2079-6412); Oct2021, Vol. 11 Issue 10, p1218-1218, 1p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 153249340
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Gosar%2C+Žiga%22">Gosar, Žiga</searchLink><relatesTo>1,2</relatesTo>, <i>ziga.gosar@elvez.si</i><br /><searchLink fieldCode="AU" term="%22Đonlagić%2C+Denis%22">Đonlagić, Denis</searchLink><relatesTo>3</relatesTo>, <i>denis.donlagic@um.si</i><br /><searchLink fieldCode="AU" term="%22Pevec%2C+Simon%22">Pevec, Simon</searchLink><relatesTo>3</relatesTo>, <i>simon.pevec@um.si</i><br /><searchLink fieldCode="AU" term="%22Gergič%2C+Bojan%22">Gergič, Bojan</searchLink><relatesTo>3</relatesTo>, <i>bojan.gergic@um.si</i><br /><searchLink fieldCode="AU" term="%22Mozetič%2C+Miran%22">Mozetič, Miran</searchLink><relatesTo>4,5</relatesTo>, <i>miran.mozetic@ijs.si</i><br /><searchLink fieldCode="AU" term="%22Primc%2C+Gregor%22">Primc, Gregor</searchLink><relatesTo>4,5</relatesTo>, <i>gregor.primc@ijs.si</i><br /><searchLink fieldCode="AU" term="%22Vesel%2C+Alenka%22">Vesel, Alenka</searchLink><relatesTo>4,5</relatesTo>, <i>alenka.vesel@guest.arnes.sirok.zaplotnik@ijs.si</i><br /><searchLink fieldCode="AU" term="%22Zaplotnik%2C+Rok%22">Zaplotnik, Rok</searchLink><relatesTo>4,5</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Coatings+%282079-6412%29%22">Coatings (2079-6412)</searchLink>; Oct2021, Vol. 11 Issue 10, p1218-1218, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=153249340
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/coatings11101218
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: 1218
    Titles:
      – TitleFull: Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Gosar, Žiga
      – PersonEntity:
          Name:
            NameFull: Đonlagić, Denis
      – PersonEntity:
          Name:
            NameFull: Pevec, Simon
      – PersonEntity:
          Name:
            NameFull: Gergič, Bojan
      – PersonEntity:
          Name:
            NameFull: Mozetič, Miran
      – PersonEntity:
          Name:
            NameFull: Primc, Gregor
      – PersonEntity:
          Name:
            NameFull: Vesel, Alenka
      – PersonEntity:
          Name:
            NameFull: Zaplotnik, Rok
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 10
              Text: Oct2021
              Type: published
              Y: 2021
          Identifiers:
            – Type: issn-print
              Value: 20796412
          Numbering:
            – Type: volume
              Value: 11
            – Type: issue
              Value: 10
          Titles:
            – TitleFull: Coatings (2079-6412)
              Type: main
ResultId 1