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Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks.

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Bibliographic Details
Title: Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks.
Authors: Schlosser, Tobias1, Friedrich, Michael1, Beuth, Frederik1, Kowerko, Danny1, danny.kowerko@cs.tu-chemnitz.de
Source: Journal of Intelligent Manufacturing; Apr2022, Vol. 33 Issue 4, p1099-1123, 25p
Database: Applied Science & Technology Source
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Description
ISSN:09565515
DOI:10.1007/s10845-021-01906-9