An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices.
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| Title: | An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices. |
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| Authors: | Devaray, Premdass1, Hatta, Sharifah Fatmadiana Wan Muhammad2, Wong, Yew Hoong1, yhwong@um.edu.my |
| Source: | Journal of Materials Science: Materials in Electronics; Apr2022, Vol. 33 Issue 10, p7313-7348, 36p |
| Database: | Applied Science & Technology Source |
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