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Low-Temperature Direct Bonding of SiC to Si via Plasma Activation.

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Title: Low-Temperature Direct Bonding of SiC to Si via Plasma Activation.
Authors: Wang, Fengxuan1,2, wangfengxuan@semi.ac.cnxyang@semi.ac.cn, Yang, Xiang2, yqzhao@semi.ac.cn, Zhao, Yongqiang2,3, fhyang@semi.ac.cnwujingmin@semi.ac.cn, Wu, Jingmin2,3, gzy@semi.ac.cn, Guo, Zhiyu2,3, He, Zhi4, hezhi@ime.ac.cn, Fan, Zhongchao1,2, hezhi@ime.ac.cn, Yang, Fuhua3
Source: Applied Sciences (2076-3417); Apr2022, Vol. 12 Issue 7, p3261-3261, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 156248765
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Low-Temperature Direct Bonding of SiC to Si via Plasma Activation.
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  Data: <searchLink fieldCode="AU" term="%22Wang%2C+Fengxuan%22">Wang, Fengxuan</searchLink><relatesTo>1,2</relatesTo>, <i>wangfengxuan@semi.ac.cnxyang@semi.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Yang%2C+Xiang%22">Yang, Xiang</searchLink><relatesTo>2</relatesTo>, <i>yqzhao@semi.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Yongqiang%22">Zhao, Yongqiang</searchLink><relatesTo>2,3</relatesTo>, <i>fhyang@semi.ac.cnwujingmin@semi.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Wu%2C+Jingmin%22">Wu, Jingmin</searchLink><relatesTo>2,3</relatesTo>, <i>gzy@semi.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Guo%2C+Zhiyu%22">Guo, Zhiyu</searchLink><relatesTo>2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22He%2C+Zhi%22">He, Zhi</searchLink><relatesTo>4</relatesTo>, <i>hezhi@ime.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Fan%2C+Zhongchao%22">Fan, Zhongchao</searchLink><relatesTo>1,2</relatesTo>, <i>hezhi@ime.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Yang%2C+Fuhua%22">Yang, Fuhua</searchLink><relatesTo>3</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Apr2022, Vol. 12 Issue 7, p3261-3261, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=156248765
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        Value: 10.3390/app12073261
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        Text: English
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              Text: Apr2022
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