Recrystallization of thick implanted GeSn layers with nanosecond laser annealing.
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| Title: | Recrystallization of thick implanted GeSn layers with nanosecond laser annealing. |
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| Authors: | Casiez, L.1, Bernier, N.1, Chrétien, J.2, Richy, J.1, Rouchon, D.1, Bertrand, M.1, Mazen, F.1, Frauenrath, M.1, Chelnokov, A.1, Hartmann, J. M.1, Calvo, V.2, Pauc, N.2, Reboud, V.1, vincent.reboud@cea.fr, Acosta Alba, P.1 |
| Source: | Journal of Applied Physics; 4/21/2022, Vol. 131 Issue 15, p1-13, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0085107 |
