Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method.
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| Title: | Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method. |
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| Authors: | Sonklin, Thita1, Munthala, Dhanunjaya1, Leuasoongnoen, Pimchanok2, Janphuang, Pattanapong2, Pojprapai, Soodkhet1, Soodkhet@g.sut.ac.th |
| Source: | Journal of Materials Science: Materials in Electronics; Jul2022, Vol. 33 Issue 21, p16977-16986, 10p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-022-08576-0 |
