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Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method.

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Title: Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method.
Authors: Sonklin, Thita1, Munthala, Dhanunjaya1, Leuasoongnoen, Pimchanok2, Janphuang, Pattanapong2, Pojprapai, Soodkhet1, Soodkhet@g.sut.ac.th
Source: Journal of Materials Science: Materials in Electronics; Jul2022, Vol. 33 Issue 21, p16977-16986, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 157889635
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Sonklin%2C+Thita%22">Sonklin, Thita</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Munthala%2C+Dhanunjaya%22">Munthala, Dhanunjaya</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Leuasoongnoen%2C+Pimchanok%22">Leuasoongnoen, Pimchanok</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Janphuang%2C+Pattanapong%22">Janphuang, Pattanapong</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Pojprapai%2C+Soodkhet%22">Pojprapai, Soodkhet</searchLink><relatesTo>1</relatesTo>, <i>Soodkhet@g.sut.ac.th</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Jul2022, Vol. 33 Issue 21, p16977-16986, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=157889635
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10854-022-08576-0
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 16977
    Titles:
      – TitleFull: Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Sonklin, Thita
      – PersonEntity:
          Name:
            NameFull: Munthala, Dhanunjaya
      – PersonEntity:
          Name:
            NameFull: Leuasoongnoen, Pimchanok
      – PersonEntity:
          Name:
            NameFull: Janphuang, Pattanapong
      – PersonEntity:
          Name:
            NameFull: Pojprapai, Soodkhet
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 21
              M: 07
              Text: Jul2022
              Type: published
              Y: 2022
          Identifiers:
            – Type: issn-print
              Value: 09574522
          Numbering:
            – Type: volume
              Value: 33
            – Type: issue
              Value: 21
          Titles:
            – TitleFull: Journal of Materials Science: Materials in Electronics
              Type: main
ResultId 1