Growth mechanism of TiN reaction layers produced on AlN via active metal bonding.
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| Title: | Growth mechanism of TiN reaction layers produced on AlN via active metal bonding. |
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| Authors: | Terasaki, Nobuyuki1,2, terasaki@mmc.co.jp, Sakaguchi, Moe3, Chiba, Hajime3, Ohashi, Touyou1, Nagatomo, Yoshiyuki1, Kuromitsu, Yoshirou1, Sekino, Tohru2, Knowles, Kevin M.4 |
| Source: | Journal of Materials Science; Jul2022, Vol. 57 Issue 28, p13300-13313, 14p, 4 Color Photographs, 7 Black and White Photographs, 1 Diagram, 3 Charts, 2 Graphs |
| Database: | Applied Science & Technology Source |
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| ISSN: | 00222461 |
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| DOI: | 10.1007/s10853-022-07472-6 |
