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The mechanism of phase transition induced by oxygen doping in zirconium nitride thin films.

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Bibliographic Details
Title: The mechanism of phase transition induced by oxygen doping in zirconium nitride thin films.
Authors: You, Minmin1,2, Li, Yanjie1,2, Zhang, Haikuo1,2, Lin, Zude1, Li, Jinjin1, Li, Xiuyan1, xiuyanli@sjtu.edu.cn, Liu, Jingquan1, jqliu@sjtu.edu.cn
Source: Journal of Materials Science; Oct2022, Vol. 57 Issue 39, p18456-18467, 12p, 1 Color Photograph, 3 Diagrams, 1 Chart, 3 Graphs
Database: Applied Science & Technology Source
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ISSN:00222461
DOI:10.1007/s10853-022-07182-z