Downstream Electric Field Effects during Film Deposition with a Radio Frequency Plasma and Observations of Carbon Reduction.
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| Title: | Downstream Electric Field Effects during Film Deposition with a Radio Frequency Plasma and Observations of Carbon Reduction. |
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| Authors: | Butcher, Kenneth Scott Alexander1,2, sbutcher@meaglow.com, Georgiev, Vasil1, Georgieva, Dimka1, Gergova, Rositsa3, Terziyska, Penka4, Binsted, Peter W.5 |
| Source: | Coatings (2079-6412); Oct2022, Vol. 12 Issue 10, p1581-N.PAG, 21p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings12101581 |
