Data-driven fractional order feedback and model-less feedforward control of a XY reluctance-actuated micropositioning stage.
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| Title: | Data-driven fractional order feedback and model-less feedforward control of a XY reluctance-actuated micropositioning stage. |
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| Authors: | Zhang, Xu1, Lai, Leijie1, lailj@sues.edu.cn, Li, Pengzhi2, Zhu, Li-Min3 |
| Source: | Review of Scientific Instruments; 11/1/2022, Vol. 93 Issue 11, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0098759 |