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Self‐Aligned Polymer Film Patterning on Microstructured Silicon Surfaces.

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Bibliographic Details
Title:	Self‐Aligned Polymer Film Patterning on Microstructured Silicon Surfaces.
Authors:	Schutzeichel, Christopher^1,2, Kiriy, Nataliya¹, Kiriy, Anton¹, Voit, Brigitte^1,2, voit@ipfdd.de
Source:	Macromolecular Chemistry & Physics; Dec2022, Vol. 223 Issue 23, p1-7, 7p
Database:	Applied Science & Technology Source

Description
ISSN:	10221352
DOI:	10.1002/macp.202200228