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Self‐Aligned Polymer Film Patterning on Microstructured Silicon Surfaces.

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Bibliographic Details
Title: Self‐Aligned Polymer Film Patterning on Microstructured Silicon Surfaces.
Authors: Schutzeichel, Christopher1,2, Kiriy, Nataliya1, Kiriy, Anton1, Voit, Brigitte1,2, voit@ipfdd.de
Source: Macromolecular Chemistry & Physics; Dec2022, Vol. 223 Issue 23, p1-7, 7p
Database: Applied Science & Technology Source
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