A Novel Compliant Nanopositioning Stage Driven by a Normal-Stressed Electromagnetic Actuator.
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| Title: | A Novel Compliant Nanopositioning Stage Driven by a Normal-Stressed Electromagnetic Actuator. |
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| Authors: | Chen, Li1, Niu, Yuhan1, Yang, Xu2, Zhu, Wu-Le3, Zhu, Li-Min4, Zhu, Zhiwei1, zw.zhu@njust.edu.cn |
| Source: | IEEE Transactions on Automation Science & Engineering; Oct2022, Vol. 19 Issue 4, p3039-3048, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 15455955 |
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| DOI: | 10.1109/TASE.2021.3105683 |
