The Impact of Hot Carrier Injection-Induced Device Degradation for Lower-Power FinFETs.
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| Title: | The Impact of Hot Carrier Injection-Induced Device Degradation for Lower-Power FinFETs. |
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| Authors: | Chen, Yu-Lin1,2, Yeh, Wen-Kuan1,3, Hsu, Heng-Tung1, Chen, Ke-Horng2, Lien, Der-Hsien4, Lin, Wen-Chin5, Yu, Tien-Han1, Chiu, Yu-Sheng3, Godwinraj, D6, Godfrey, D3,7, Wu, Chien-Hung8, rossiwu@chu.edu.tw |
| Source: | Journal of Electronic Materials; Feb2023, Vol. 52 Issue 2, p1391-1399, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-022-10087-x |
