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Role of Oxygen in PECVD Carbon Nanotubes Growth: Experiments and Modeling.

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Title: Role of Oxygen in PECVD Carbon Nanotubes Growth: Experiments and Modeling.
Authors: Andalouci, A.1, Hinkov, I.2, Brinza, O.1, Kane, A.3, Porosnicu, C.4, Barry, A. H.3, Chérif, S. M.1, Farhat, S.1, farhat@lspm.cnrs.fr
Source: Plasma Chemistry & Plasma Processing; May2023, Vol. 43 Issue 3, p757-786, 30p
Database: Applied Science & Technology Source
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ISSN:02724324
DOI:10.1007/s11090-023-10317-y