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Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling.

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Bibliographic Details
Title: Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling.
Authors: Karmakar, A.1, ayan_ns@scl.gov.in, Biswas, B.2, balaka.biswas@gmail.com, Chauhan, A.K.1, akr.chauhan@gmail.com
Source: IETE Journal of Research; Apr2023, Vol. 69 Issue 4, p1995-2004, 10p
Database: Applied Science & Technology Source
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Description
ISSN:03772063
DOI:10.1080/03772063.2021.1880342